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Substrate parameters values?!!! (Read 845 times)
Hamid1982
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Substrate parameters values?!!!
Mar 25th, 2017, 2:49am
 
Hi to All,

How I can know(extract) the following values of substrate parameters(mju, Eox,toxM1M2, tox, t, conductivity) ​​from the figures of this substrate example (see attached file)???

I need to your help please.

Cordialy.
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Maks
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Re: Substrate parameters values?!!!
Reply #1 - Apr 14th, 2017, 4:56pm
 
Your document does not explain what these parameters mean.

Are you asking - where can you find material and geometrical parameters of your design (Si substrate and BEOL stack on top of it) - like layer thicknesses, dielectric constants, etc.?

Max
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